A critical challenge for flexible biomedical implants is in the development of materials and structures that enable intimate coupling to bio tissues with long-term stability.
Through a materials and integration strategy that combines highly doped silicon nano-membranes chemically bonded to thin films of thermal silicon dioxide in a construct that simultaneously serves as a biofluid barrier and a conductively coupled bio-interface, the problem is addressed.
The results provide a versatile route to bio-integrated forms of flexible electronics that can incorporate the most advanced silicon device technologies with broad applications in electrical interfaces to the brain and to other organ systems.
